EQUIPENT SALES
Available TEL 300mm Furnace Inventory (as of Nov 19, 2019)
Model | Process | Serial Number | Vintage | Wafer Size |
---|---|---|---|---|
Formula Nitride | LPCVD | P00000545025 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000545026 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000695103 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000695102 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000695057 | 2013 | 300mm |
Formula Nitride | LPCVD | P00001595079 | 2015 | 300mm |
Formula Nitride | LPCVD | P000005Y5090 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000385049 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000345047 | 2013 | 300mm |
Formula Nitride | LPCVD | P00000325027 | 2003 | 300mm |
Formula Nitride | LPCVD | P00000345045 | 2003 | 300mm |
Formula Nitride | LPCVD | P00000345046 | 2003 | 300mm |
Formula Nitride | LPCVD | P00000375057 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00000775055 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000765053 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000655044 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000765052 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000745035 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000655045 | 2006 | 300mm |
Formula ALD High-K | LPCVD | P00000775054 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000755032 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000745036 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P000001395052 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00000755048 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P000013X5058 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00001365028 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P000013X5057 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00001395053 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00000735027 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00000735029 | 2007 | 300mm |
Formula ALD High-K | LPCVD | P00001465050 | 2014 | 300mm |
Formula ALD High-K | LPCVD | P00001395059 | 2013 | 300mm |
Formula ALD High-K | LPCVD | P00001365030 | 2013 | 300mm |
INDY ALD High-K | LPCVD | R00001055062 | 300mm | |
INDY Doped Poly | LPCVD | R0000775240 | 300mm | |
INDY ALD High-K | LPCVD | R00001095068 | 300mm | |
ALPHA 303i | Anneal | L00000595224 | 12월말 입고 예정 | |
ALPHA 303i | Anneal | L00000545108 | 12월말 입고 예정 | |
ALPHA 303i | Anneal | L00000595270 | 12월말 입고 예정 |
Available TEL 300mm Furnace Inventory (as of July 31, 2019)
Tool # | Make | Model | Serial Number | Current Process | Modification Potential | Quantity | Remark | Missing Parts |
---|---|---|---|---|---|---|---|---|
VT0002 | TEL | Alpha-303i-K | L000005X5349 | PIQ | Argon-Anneal, Oxidation | 1 | None | |
VT0003 | TEL | Formula | P00000335024 | Nitride | SiGe Poly, N2-Anneal | 1 | None | |
VT0004 | TEL | Formula | P00000365072 | SiGe Poly | N2-Anneal, Nitride | 1 | None | |
VT0005 | TEL | Formula | P00000345049 | Nitride | SiGe Poly, N2-Anneal | 1 | DNFC12 |
Wafer Transfer, PCBs |
VT0006 | TEL | INDY PLUS-B-M | S000001025011 | ALD High-K | DCS-HTO, MS-HTO, SiGe Poly | 1 | None | |
VT0007 | TEL | INDY PLUS-B-M | S000001025015 | ALD High-K | DCS-HTO, MS-HTO, SiGe Poly | 1 | None | |
1055154 | TEL | INDY PLUS-B-M | S00001055154 | CDZRO | DCS-HTO, MS-HTO, SiGe Poly | 1 | none | |
1055114 | TEL | INDY PLUS-B-M | S00001055114 | CDZRO | DCS-HTO, MS-HTO, SiGe Poly | 1 | none | |
1065159 | TEL | INDY PLUS-B-M | S00001065159 | MDZrOx | DCS-HTO, MS-HTO, SiGe Poly | 1 | none |
300mm Furnace 装置 LIST
Date: 2018.07.02
装置 | Maker | Model | Process | S/N | SIZE |
---|---|---|---|---|---|
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | 2DC6-14902 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | 2DC6-14761 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14436 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14285 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14289 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14284 | 12" |
Furnace | TEL | INDYPLUS | ALD | S00001055154 | 12" |
Furnace | TEL | INDYPLUS | ALD | S00001055114 | 12" |
Furnace | TEL | INDYPLUS | ALD | S00001065159 | 12" |
Furnace | TEL | INDYPLUS | ALD | S000010Y5444 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14094-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14508-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14509-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14441-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14901-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14510-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14215-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14562-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14240-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14274-1 | 12" |
Furnace | KOKUSAI | CX-5000 (DJ-1206VN-DF) | TiN | T2DC6-14563-1 | 12" |
그외보유설비
1. CX5000 300MM : SIO2설비(ALD) 3대보유
2. CX3000 300MM : PYRO설비 3대보유/H2 ANNEAL 1대보유