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Available TEL 300mm Furnace Inventory (as of Nov 19, 2019)

Model Process Serial Number Vintage Wafer Size
Formula Nitride LPCVD P00000545025 2013 300mm
Formula Nitride LPCVD P00000545026 2013 300mm
Formula Nitride LPCVD P00000695103 2013 300mm
Formula Nitride LPCVD P00000695102 2013 300mm
Formula Nitride LPCVD P00000695057 2013 300mm
Formula Nitride LPCVD P00001595079 2015 300mm
Formula Nitride LPCVD P000005Y5090 2013 300mm
Formula Nitride LPCVD P00000385049 2013 300mm
Formula Nitride LPCVD P00000345047 2013 300mm
Formula Nitride LPCVD P00000325027 2003 300mm
Formula Nitride LPCVD P00000345045 2003 300mm
Formula Nitride LPCVD P00000345046 2003 300mm
Formula Nitride LPCVD P00000375057 2013 300mm
Formula ALD High-K LPCVD P00000775055 2007 300mm
Formula ALD High-K LPCVD P00000765053 2007 300mm
Formula ALD High-K LPCVD P00000655044 2007 300mm
Formula ALD High-K LPCVD P00000765052 2007 300mm
Formula ALD High-K LPCVD P00000745035 2007 300mm
Formula ALD High-K LPCVD P00000655045 2006 300mm
Formula ALD High-K LPCVD P00000775054 2007 300mm
Formula ALD High-K LPCVD P00000755032 2007 300mm
Formula ALD High-K LPCVD P00000745036 2007 300mm
Formula ALD High-K LPCVD P000001395052 2013 300mm
Formula ALD High-K LPCVD P00000755048 2007 300mm
Formula ALD High-K LPCVD P000013X5058 2013 300mm
Formula ALD High-K LPCVD P00001365028 2013 300mm
Formula ALD High-K LPCVD P000013X5057 2013 300mm
Formula ALD High-K LPCVD P00001395053 2013 300mm
Formula ALD High-K LPCVD P00000735027 2007 300mm
Formula ALD High-K LPCVD P00000735029 2007 300mm
Formula ALD High-K LPCVD P00001465050 2014 300mm
Formula ALD High-K LPCVD P00001395059 2013 300mm
Formula ALD High-K LPCVD P00001365030 2013 300mm
INDY ALD High-K LPCVD R00001055062 300mm
INDY Doped Poly LPCVD R0000775240 300mm
INDY ALD High-K LPCVD R00001095068 300mm
ALPHA 303i Anneal L00000595224 12월말 입고 예정
ALPHA 303i Anneal L00000545108 12월말 입고 예정
ALPHA 303i Anneal L00000595270 12월말 입고 예정

Available TEL 300mm Furnace Inventory (as of July 31, 2019)

Tool # Make Model Serial Number Current Process Modification Potential Quantity Remark Missing Parts
VT0002 TEL Alpha-303i-K L000005X5349 PIQ Argon-Anneal, Oxidation 1 None
VT0003 TEL Formula P00000335024 Nitride SiGe Poly, N2-Anneal 1 None
VT0004 TEL Formula P00000365072 SiGe Poly N2-Anneal, Nitride 1 None
VT0005 TEL Formula P00000345049 Nitride SiGe Poly, N2-Anneal 1 DNFC12 Wafer
Transfer, PCBs
VT0006 TEL INDY PLUS-B-M S000001025011 ALD High-K DCS-HTO, MS-HTO, SiGe Poly 1 None
VT0007 TEL INDY PLUS-B-M S000001025015 ALD High-K DCS-HTO, MS-HTO, SiGe Poly 1 None
1055154 TEL INDY PLUS-B-M S00001055154 CDZRO DCS-HTO, MS-HTO, SiGe Poly 1 none
1055114 TEL INDY PLUS-B-M S00001055114 CDZRO DCS-HTO, MS-HTO, SiGe Poly 1 none
1065159 TEL INDY PLUS-B-M S00001065159 MDZrOx DCS-HTO, MS-HTO, SiGe Poly 1 none

300mm Furnace 装置 LIST

Date: 2018.07.02

装置 Maker Model Process S/N SIZE
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN 2DC6-14902 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN 2DC6-14761 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14436 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14285 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14289 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14284 12"
Furnace TEL INDYPLUS ALD S00001055154 12"
Furnace TEL INDYPLUS ALD S00001055114 12"
Furnace TEL INDYPLUS ALD S00001065159 12"
Furnace TEL INDYPLUS ALD S000010Y5444 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14094-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14508-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14509-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14441-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14901-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14510-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14215-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14562-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14240-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14274-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14563-1 12"

그외보유설비

  • 1. CX5000 300MM : SIO2설비(ALD) 3대보유

  • 2. CX3000 300MM : PYRO설비 3대보유/H2 ANNEAL 1대보유