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Available TEL 300mm Furnace Inventory (as of July 31, 2019)

Tool # Make Model Serial Number Current Process Modification Potential Quantity Remark Missing Parts
VT0002 TEL Alpha-303i-K L000005X5349 PIQ Argon-Anneal, Oxidation 1 None
VT0003 TEL Formula P00000335024 Nitride SiGe Poly, N2-Anneal 1 None
VT0004 TEL Formula P00000365072 SiGe Poly N2-Anneal, Nitride 1 None
VT0005 TEL Formula P00000345049 Nitride SiGe Poly, N2-Anneal 1 DNFC12 Wafer
Transfer, PCBs
VT0006 TEL INDY PLUS-B-M S000001025011 ALD High-K DCS-HTO, MS-HTO, SiGe Poly 1 None
VT0007 TEL INDY PLUS-B-M S000001025015 ALD High-K DCS-HTO, MS-HTO, SiGe Poly 1 None
1055154 TEL INDY PLUS-B-M S00001055154 CDZRO DCS-HTO, MS-HTO, SiGe Poly 1 none
1055114 TEL INDY PLUS-B-M S00001055114 CDZRO DCS-HTO, MS-HTO, SiGe Poly 1 none
1065159 TEL INDY PLUS-B-M S00001065159 MDZrOx DCS-HTO, MS-HTO, SiGe Poly 1 none

300mm Furnace 装置 LIST

Date: 2018.07.02

装置 Maker Model Process S/N SIZE
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN 2DC6-14902 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN 2DC6-14761 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14436 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14285 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14289 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14284 12"
Furnace TEL INDYPLUS ALD S00001055154 12"
Furnace TEL INDYPLUS ALD S00001055114 12"
Furnace TEL INDYPLUS ALD S00001065159 12"
Furnace TEL INDYPLUS ALD S000010Y5444 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14094-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14508-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14509-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14441-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14901-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14510-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14215-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14562-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14240-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14274-1 12"
Furnace KOKUSAI CX-5000 (DJ-1206VN-DF) TiN T2DC6-14563-1 12"

그외보유설비

  • 1. CX5000 300MM : SIO2설비(ALD) 3대보유

  • 2. CX3000 300MM : PYRO설비 3대보유/H2 ANNEAL 1대보유