| Wafer Size | machine | Vendor | Model | Description | Q;ty |
|---|---|---|---|---|---|
| 200mm | Furnace | TEL | Alpha-805 | Non Load Lock type → Load Lock type D-Poly → PH3 Gas Line added |
5 1 |
| 200mm | Furnace | TEL | Alpha-808 | TEOS → Nitride TEOS → LoadLock Nitride D-poly → LoadLock D-poly |
2 2 1 |
| 200mm | Furnace | TEL | Waves | TEOS → LoadLock Nitride | 1 |
| 200mm | Furnace | KE | DJ-815 DD-853 DD-823 |
LoadLock D-poly → Pyro(NO GATE) Pyro → Pyro(TCA) N2 Anneal → Pyro(N2O) |
1 1 1 |
| 200mm | Furnace | TEL | Alpha-805 | Wafer Transfer Fork Sensor Modify | 50 |
| 200mm | Furnace | TEL | Alpha-808 | TEOS → HTO TEOS → LoadLock D-poly |
1 2 |
| 200mm | Furnace | KE | DJ-835 DJ-823 |
LoadLock Nitride → LoadLock D-poly(CLF3) D-poly(2 injector type) → D-poly(3injector) |
1 2 |
| 200mm | Furnace | KE | DJ-853 | MTO → D-poly HTO → D-poly HTO → Nitride |
1 1 1 |
| 200mm | TRACK | TEL TEL |
Act-8 Mark7 |
유휴장비 매각(Hynix M4 → Hynix M8) 유휴장비 매각(Hynix M4 → Hynix M8) |
3 2 |
| 200mm | Furnace | TEL KE |
Alpha-805 DD/DJ-813 |
Non Variable Wafer Chuck → Var. Wafer Chuck Non Variable Wafer Chuck → Var. Wafer Chuck |
18 14 |
| 200mm | Furnace Furnace |
TEL TEL |
Alpha-808 Alpha-808 |
LPCVD FTPS SYSTEM |
7 7 |
| 200mm | Furnace | TEL | Alpha-808 | HTO → LoadLock D-poly D-poly → LoadLock D-poly D-poly → TOINB(PH3 Anneal) |
2 1 4 |
| 200mm | Furnace | TEL | Alpha-808 | ISO Poly → D-poly ISO Poly → Nitride Gate Oxide → D-poly HTO → TEOS |
2 2 1 2 |
| 200mm | Furnace | KE | DJ-823 | HTO → TEOS | 8 |
| 200mm | Furnace | TEL | Alpha-808 | N2 Anneal → Nitride TEOS → Nitride |
2 4 |
| 200mm | Furnace | KE | DD-823 | Pyro → Pix Curing | 2 |
| 150mm | Furnace | TEL | VCF | TEOS → HTO | 1 |
| 200mm | Furnace | KE | DD-802 | TEOS → H2 Alloy N2 Anneal → N2 Anneal(Hi-Temp) |
2 1 |
| 200mm | Furnace | TEL | Alpha-858 Alpha-808 |
TEOS → D-poly TEOS → Nitride |
2 1 |
| 200mm | TRACK | TEL | Act-8 | Spinner Modify | 4 |
| 200mm | Furnace | KE | DJ-823 DJ-835 |
HTO → TEOS Nitride Power분리형 → U/BOX, Power Box 일체형 |
1 1 |
| 200mm | TRACK | KE | DJ-802 | Pyro → Pyro(Hi-Temp) | 1 |
| 6″Type | Furnace | TEL | IW-6 | SOFTWARE PROGRAM MODIFY | 3 |
2010년 영업 실적내역
| Wafer Size | machine | Vendor | Model | Description | Q;ty |
|---|---|---|---|---|---|
| 200mm | Furnace | TEL | Alpha-808 | LP CVD | 1SET |
| 200mm | Furnace | TEL | Alpha-8SE | OXIDE | 1SET |
| 200mm | Furnace | TEL | Alpha-808 | LP CVD | 1SET |
| 200mm | Furnace | TEL | Alpha-8SE | OXIDE | 2SET |
| 200mm | Furnace | TEL | Alpha-8SE | OXIDE | 1SET |
2011년 영업 실적내역
| Wafer Size | machine | Vendor | Model | Description | Q;ty |
|---|---|---|---|---|---|
| 200mm | Furnace | TEL | Alpha-8SE | PYRO | 1SET |
| VCF | HTO | 2SET | |||
| D-POLY | 1SET | ||||
| KE | 853 | PYRO | 4SET | ||
| ANNEAL | 2SET | ||||
| D-POLY | 1SET | ||||
| RTP | AST | AST2800 | RTP | 1SET |