| Maker | HiKE |
|---|---|
| Model | DJ-1205V |
| Serial Number | T2DC7-11835 |
| Vintage | 2003-07 |
| Location | Clean Room |
| Wafer Size | 12″ |
| Tube Material | Quartz |
|---|---|
| Boat Material | SIC |
| Production wafes | 100 |
| Process Gas | 100%SiH4(F.S:4SLM) 1%PH3/He(F.S:0.3SLM / 0.05SLM*4Line) 1%O2/Ar(F.S:5SLM)) |
| Cleaning Gas | CIF3(F.S;5SLM) |
| MFC Maker | HITACHI-Metals |
| MFC Model | FC-D980Series |
| Process Temp | 550-700deg |
| Pressure Control | APC Valve |
